Canon is using its in-house ultra-precision cutting machines to provide the market with new optical devices for spectroscopy, including the world's first CdZnTe and InP immersion gratings and IFUs. They are used in the VLT and ELT instruments of Europe/ESO and in the instruments of the US/KECK and DKIST. The advantage of high-precision cutting is that surface roughness of less than 1 nm RMS can be obtained by cutting alone, so if the shape can be fabricated by cutting, it becomes an optical device. Since no post-processing such as polishing is required, optical devices with fine and sharp structures can be fabricated, and machined image slicers are a major advance in IFUs.
In my presentation, I will introduce the performance of our original cutting machine and the devices we have fabricated.